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Chips
FLIC distance measurement is performed on silicon chips (10x33mm), covered with microscopic steps of silicon oxide. Two types have been manufactured till now:

- 4 oxide steps; 5µm wide; 10,55,100,145nm high
- 16 oxide steps; 2.5µm wide; 10...320nm high

They show brilliant interference colors when studied in a microscope.

Geometry
Interference colors
in white light