FLIC distance measurement is performed on silicon chips (10x33mm), covered with microscopic steps of silicon oxide. Two types have been manufactured till now:

- 4 oxide steps; 5µm wide; 10,55,100,145nm high
- 16 oxide steps; 2.5µm wide; 10...320nm high

They show brilliant interference colors when studied in a microscope.

Interference colors
in white light